Micro Structured Glass Wafers

Our proprietary glass forming and processing technology provides proprietary glass wafer microstructure solutions for the semiconductor, MEMS and biotechnology industries. We are known around the world for building partnerships with our customers by always delivering state-of-the-art products focused on our client’s projects. In addition, YEK Glass' proprietary glass thermoforming method reduces stress in the glass material caused by heat affected zones (HAZ) to increase yield and minimize losses. Utilizing glass’ unique properties can optimize your 2.5~3D semiconductor packaging.

Application

MEMS sensor, 3D integrated MEMS sensor, CMOS image sensor, automobile RF & camera module, RF components, lidar sensors

Standard Production Spec

Today's semiconductor devices are demanding more miniaturization, higher performance, and multifunctionalization. In order to go beyond Moore's law and achieve More than Moore technologies, it is essential to increase the density of semiconductor integrated circuits. For this purpose, interposers with electrode wires inserted directly into the board instead of lead frame wire bonding will become mainstream in the future.

Currently, there are through-electrode substrates such as Though Silicon Vias (TSV) in which through-electrodes are applied to metallized Si wafers, and glass substrates in which current is made possible by metal plating on existing through-hole glass substrates. However, all of them have many limitations in shape processing: their surface smoothness is poor, and there is a disadvantage that electricity is easily leaked to the metal Si wafer or metal plating from the aspect of current conduction of the semiconductor device. Ideally electrodes would be placed directly in the glass, but because glass is hard and fragile, it’s difficult to process or cost prohibitive. However, interposer wafers processed with our innovative glass mold processing technique can solve many problems. Through glass via wiring can be arranged precisely. In addition, Through glass via electrode wiring can be routed not only in the glass plane but also inside concave shapes.

Glass substrates have high smoothness and shape stability and contribute to the prevention of yield degradation due to defects in sealing or processing defects during dicing and cutting. Interposer wafer processing, which tends to cause low yield or high cost while dicing, can be produced in large quantities at low cost with our glass molding technology. We believe that our interposer wafer will contribute to the manufacture of more advanced semiconductor devices.

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Spec
Electrode
Material
A
350μm↑(±20μm)
Kovar, 42 Alloy, Tungsten
Borofloat 33
B
~12 inch
Kovar, 42 Alloy, Tungsten
Borofloat 33
C
Φ500μm↑
Kovar, 42 Alloy, Tungsten
Borofloat 33
D
350μm↑
Kovar, 42 Alloy, Tungsten
Borofloat 33
E
20°↑
Kovar, 42 Alloy, Tungsten
Borofloat 33
F
200μm↑
Kovar, 42 Alloy, Tungsten
Borofloat 33
G
750μm↑(±50μm)
Kovar, 42 Alloy, Tungsten
Borofloat 33
H
~30μm
Kovar, 42 Alloy, Tungsten
Borofloat 33

Precision Processing

Multiple vias can be positioned with precision. (±50μm)

Highly Flexible Via Layout Design

Through glass via electrodes can be placed in a variety of shapes such as cavities as well as flat shapes.

Superior Electrical Properties

Low electrical loss and high electrical signal transmission due to glass insulation.

Out-gas Clearance

Anodic bonding with Si wafer eliminates the outgassing problem of encapsulant.

Wide range of applications

With over 40 years of glass forming technology experience, we realize designs that were impossible with conventional processes.

Next Challenge

Ultra fine through wiring (φ0.1mm・Pitch 0.01mm)

We can help you tackle your latest projects.

We are always looking for new challenges.
Please contact us and our project manager will reach out to you.